20. 11. 2019

Dr. Andreas Dorsel (Carl Zeiss SMT GmbH):
Nano-Lithography - Where science meets industry


Abstrakt:

After a cursory glimpse on the history of microlithography, this talk will
provide you with a solid notion of what can be achieved in nano-lithography
today, what the present technical limitations are and what we consider at
present fundamental boundaries of what may be possible in the future. Carl
Zeiss SMT has been in this business for more than 50 years and has lived
through many of the technological milestones from the early beginnings of
integrated circuits to present-day extreme integration using EUV and allowing
qualitatively new applications of micro- or rather nano-electronics. While the
technologies involved are more than can be covered in a single seminar, you
will get an overview of a wide range of technical aspects that have to be
addressed in order to succeed - and how we are doing in addressing them.