10.3.2021

Petr Klapetek (Czech Metrology Institute, Brno):
Scanning Thermal Microscopy - experiences and perspectives

Abstrakt:

Scanning Thermal Microscopy is a less widely used technique from the family of
Scanning Probe Microscopy methods. It is based on use of a small heated probe
that is operated in a similar way like probe in an Atomic Force Microscope,
providing in parallel an information about local thermal properties or local
temperature. The method can be therefore useful for analyzing hot spots on
microelectronic components or for developing composite materials for heat
management at microscale. In this talk the method will be presented, including
experiences with using different instruments, probes, regimes (temperature,
thermal conductivity, thermomechanical properties) and experiences with making
these measurements metrologically traceable. State-of-the art methodologies for
obtaining quantitative data will be presented and numerous open questions on
both experimental and theoretical side will be discussed.