Seminář ÚFKL: Petr Bábor

Ústav fyziky kondenzovaných látek vás zve na přednášku

Petr Bábor (FSI a CEITEC VUT):
SIMS Applications – from Tomography to Real Time Monitoring of Catalytic Reactions

This talk will briefly introduce Secondary Ion Mass Spectrometry (SIMS), which has a wide range of applications. In addition to standard applications such as depth profiling of semiconductors including quantitative analysis of dopants, the possibilities of analysis in tomographic mode in combination with X-ray tomography and other methods (SEM and EDS) will be presented. Tomographic measurements will be presented on samples from the semiconductor industry. In addition, 2D SIMS analyses of the platinum surface during the catalytic oxidation of CO to CO₂ in real time will be discussed.