Deposition of Thin Films and Nanostructures
Research group at the Department of Plasma Physics and Technology
Our research group, Deposition of Thin Films and Nanostructures specializes in preparing thin films and nanomaterials using plasma. We focus on PVD (Physical Vapor Deposition) techniques with an emphasis on magnetron sputtering and HiPIMS (High-Power Impulse Magnetron Sputtering), PECVD (Plasma Enhanced Chemical Vapor Deposition) techniques, and also microwave and high-frequency methods of advanced nanomaterials preparation.
Our work includes the design of new materials and manufacturing processes, plasma deposition diagnostics, process simulation, theoretical modeling of material properties, and analysis of prepared layers and nanomaterials. We characterize the synthesized thin films and nanomaterials' composition, morphology, crystal structure, chemical bonding, electrical, optical, mechanical, and functional properties.
Our team
Prof. Petr Vašina
director of the Department of Plasma Physics and Technology
vasina(at)physics.muni.cz
ORCID
Assoc. Prof. Vilma Buršíková
complex analysis of mechanical properties of thin films
vilmab(at)physics.muni.cz
ORCID
Assoc. Prof. Pavel Souček
Research and development of new types of materials, analysis of deposition process, preparation and analysis of coatings
soucek(at)mail.muni.cz
ORCID
Assoc. Prof. Jaroslav Hnilica
Space and time resolved diagostics of plasma, study of plasma instabilities, HiPIMS
hnilica(at)mail.muni.cz
ORCID
Dr. Ondřej Jašek
Study of microwave plasma, carbon nanostructures and nanomaterials
ondrej,jasek(at)mail.muni.cz
ORCID
Dr. Peter Klein
HiPIMS plasma diagnostics using optical emission spectroscopy, high-speed cameras and probes
pklein(at)mail.muni.cz
ORCID
Dr. Matej Fekete
Research and development of new types of materials, diagnostics of the deposition process
fekete(at)physics.muni.cz
ORCID
Dr. Jaroslav Ženíšek
Ab-initio calculations of coating structure and properties, preparation of thin films, including amourphous metallic glass coatings
jzenisek(at)mail.muni.cz
SCOPUS
Dr. Pavel Ondračka
Ab-initio culations of coating structure and properties, such as WBC
ondracka(at)mail.muni.cz
ORCID
Dr. Richard Gaetan Paul Drevet
Preparation and analysis of ceramic coatings
drevet(at)mail.muni.cz
ORCID
Dr. Tereza Schmidtová
Research and analysis of protectvie coatings, including amouphous metallic glass
tschmidtova(at)sci.muni.cz
SCOPUS
Dr. Stanislava Debnárová
long-term stay at Université de Mons, Belgium
debnarova(at)mail.muni.cz
ORCID
Ph.D. students
Ondrej Kubinec
Development and study of materials with thermoelectric properties
500240(at)mail.muni.cz
Roman Přibyl
Development of multifunctional thin films deposition technology by PECVD
romanpribyl(at)mail.muni.cz
Richard Václavik
Research of nanostructured plazma-polymer thin films deposited in dusty plasma
451769(at)mail.muni.cz
Lukáš Vrána
Research of nitrides stabilized by high enthropy prepared by magnetron sputtering
lvrana(at)mail.muni.cz
Want to join our research? Contact us. We collaborate with scientific organizations from all over the world and with companies focusing on PVD technologies. Applications of our coatings and nanomaterials include:
- mechanical protective coatings – mechanical engineering
- flexible electronics
- optoelectronics
- aerospace and automotive
- hydrogen and electrical energy storage
- sensors
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